Sign In | Join Free | My burrillandco.com
Home > Magnetron Sputtering Coating Machine >

Tantalum Sputtering Coating Machine

    Buy cheap Tantalum Sputtering Coating Machine from wholesalers
     
    Buy cheap Tantalum Sputtering Coating Machine from wholesalers
    • Buy cheap Tantalum Sputtering Coating Machine from wholesalers
    • Buy cheap Tantalum Sputtering Coating Machine from wholesalers

    Tantalum Sputtering Coating Machine

    Ask Lasest Price
    Brand Name : ROYAL
    Model Number : RTSP
    Certification : CE
    Supply Ability : 10 sets per month
    Delivery Time : 14~16weeks
    • Product Details
    • Company Profile

    Tantalum Sputtering Coating Machine

    Tantalum PVD Sputtering Coating Machine, Tantalum films deposited by DC Magnetron Sputtering, PVD Tantalum Plating


    Tantalum is most widely used in the electronic industry and as a protective coating in many industries because of its good resistance to erosion.


    Sputtered tantalum films are widely used in the
    1. Microelectronics industry as the films can be reactively sputtered and thus resistivity and temperature coefficient of resistance can be controlled;

    2. Medical instruments like body implants for its highly biocompatability property;

    3. Coatings on corrosion resistant parts, such as thermowells, valve bodies, and fasteners;


    Sputtered tantalum can be also be used as an effective corrosion resistance barrier if the coating is continuous, defectected and is adherent to the substrate is intended to protect.


    RTAS1000 Technical Advantages


    1. Plug-in Integrated design system for quick installation

    2. Siemens PLC,CPU; with Industrial PC operation & control hardware

    3. Available for remote monitoring and diagnosis.
    4. Flexible, ready for upgrading

    5. Multiple cathodes for fast deposition speed


    More benefits from the machine:


    Robust Design, Stable Quality, Fast Cycle, Fast Cycle Time, High deposition speed


    Main Configurations
    MODELRTAS1000
    TECHNOLOGYDC magnetron sputtering + Cathodic arc plating
    CHAMBER MATERIALStainless Steel (S304)
    CHAMBER SIZEΦ1000*1000mm (H)
    CHAMBER TYPED shape, cylindrical chamber
    ROTATION RACK & JIG SYSTEMSatellite driving or central driving system
    POWER SUPPLIESDC Sputtering Power Supply: 2~4 sets Bias Power supply: 1 set Arc Power supply: 11 sets
    DEPOSITION MATERIALTi/Cr/TiAl, Ta, Au, Ag, Cu etc.
    DEPOSITION SOURCE

    Planar Sputtering Cathodes + circular arc cathodes

    Remark: cylinderial DC sputter is avaliable

    CONTROLPLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
    PUMP SYSTEMRotary Vane Pump: SV300B - 1 set (Leybold)
    Roots Pump: WAU1001 - 1 set (Leybold)
    Holding Pump: D60C - 1 set (Leybold)
    Magnetic Suspension Molecular Pump: MAG2200 - 2 sest (Leybold)
    GAS MASS FLOW CONTROLLER4 channels, Made in China, Seven Star (CS series, ) digital model (Ar, N2, O2, C2H2)
    VACUUM GAUGEModel: ZDF-X-LE, Made in China
    SAFETY SYSTEMNumerous safety interlocks to protect operators and equipmen
    HEATINGHeaters: 20KW. Max. temp.: 450℃
    COOLINGIndustrial Chiller (Cold Water)
    POWER MAX.100KW (Approx.)
    AVERAGE POWER CONSUMPTION45 KW (Approx.)
    GROSS WEIGHTT (Approx.)
    FOOT PRINT( L*W*H) 4000*4000 *3600 MM
    POWER ELECTRICALAC 380V/3 phases/50HZ / 5 line

    Cylindrical sputtering cathodes Planar sputtering cathodes



    Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.


    Download the brochure, please click here: Magnetron Sputtering Deposition System.pdf
    Magnetron Sputtering Deposition system applicatio...

    Quality Tantalum Sputtering Coating Machine for sale
    Inquiry Cart 0
    Send your message to this supplier
     
    *From:
    *To: SHANGHAI ROYAL TECHNOLOGY INC.
    *Subject:
    *Message:
    Characters Remaining: (0/3000)