Machine Model: RT1200-FCEV

Technology: with PECVD + PVD Magnetron Sputtering Depositing: Si, Cr, graphite targets, to generate Unbalanced closed magnetic field for high density, high uniformity and excellent corrosion resistance carbon-based film.

This RT1200-FCEV high vacuum magnetron sputtering deposition system is a tailor made model which refers to the model Multi950-R&D which we have built for Shanghai University.

It is designed with Octal chamber, flexible and reliable performances are extensively used in various applications. It satisfy the coating processes require multi different metal layers: Ta, Cr, Si, Graphite, Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-ferromagnetic metals; plus the Ion source unit,

efficiently enhance film adhesion on different substrate materials with its plasma etching performance and the PECVD process to deposit some carbon-based layers.
Equipment Structure:
Vertical orientation, octagonal structure, 2 doors opening (front and back) for easy access.
Equipment Features:
Environmentally friendly system, no hazardous waste
High integration, modular design
Commercialized and standardized for industrial mass production
Extremely efficient ion source for strong adhesion and high ionization
Easy Operation: Touch screen + PLC control, one touch operation
With Royal Technology’s software, process parameters can be programmed, saved and reproduced
Special design of Carousel system for highly uniform deposition
High productivity and stability, working 24/7 a week
Flexible, matches various sizes of plates, for single or double sides coating
PVD & PECVD coating film performance:
To improve the conductivity of surface
High corrosion resistance
High wear resistance
High hardness
Hydrophobic composition film and other functional films
Available for compound coatings: metallic and non-metallic films
Film thickness range from 100nm to 12μm, thickness tolerance ±5% Strong adhesion
Low tempering parts surface hardening treatment

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.