Copper/Aluminum/Carbon Sputtering Equipment, High Vacuum Magnetron Sputtering Deposition System

• Anti Finger Print Coating
• Plasma Hardening Treatment (PHT)

• UHV Sputtering deposition system uses the sputtering cathodes as the PVD deposition sources. It always comibled MF sputter and DC sputters for indstrial PVD coating applications. Based on different targets and sputtering deposition speed's requests, Royal Technology provides cylidrical sputters and planar sputter cathodes, mainly for fast deposition rates to satisfy industrial production coating demand.

  
  

  High Vacuum Magnetron Sputtering Deposition System is designed for copper, alumunium, plastic, metal circuit board conductive film layer plating. It can condense Nano thin film on substrates. Except Ag sputtering, it can also deposit Ni, Au, Ag, Al, Cr, stainless steel targets.

  It can deposite high uniformity films on various substrates: plastic panle, PC panle, Aluminum sheet, Ceramic sheets, Al2O3 ceramic, AlN, Silicon sheets etc.

  
  

  RTSP1215 Sputtering Coating Equipment Layout

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  RTSP series Sputtering Coating Equipment Applications:

  
  

  1. Available on substrates of: Plastic, Polymer, Glass and ceramic sheets, Stainless steel, Copper sheet, Aluminum board etc.

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• 2. To generate Nano film like: TiN, TiC, TiCN, Cr, CrC, CrN, Cu, Ag, Au, Ni, Al etc.

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  RT-SP series Sputtering Coating Equipment Design Features:

  
  

  1. Robust design, good for limited room space

  2. Easy access for maintenance and repair

  3. Fast pumping system for high yield

  4. CE standard electrical enclosure, UL standard is also available.

  5. Accurate fabrication workmanship

  6. Stable running to guarantee high quality film production.

  
  

  Ion source is original from Gencoa company, the properties:

  
  

  1. Optimized magnetic fields to produce a collimated plasma beam at standard sputtering pressures

  2. Automated regulation for the gas to maintain constant current & voltage – multi-gas auto control

  3. Graphite anode and cathode to protect the substrate from contamination and provide long-life components

  4. RF standard electrical insulation on all ion sources

  5. In-direct cooling of anode and cathode – quick switching of parts

  6. Easy switching of cathode parts to provide multiple magnetic traps for lower voltage operation, or a focused beam

  7. Voltage regulated power supply with gas adjustment feedback to maintain same current at all times

  
  

  High Vacuum Magnetron Sputtering Deposition System Technical Specifications:

  
  

  MODEL	RT1215-SP
  MATERIAL	Stainless Steel (S304)
  CHAMBER SIZE	Φ1200*1500mm (H)
  CHAMBER TYPE	1-door structure, Vertical
  SINGLE PUMP PACKAGE	Rotary VaneVacuum Pump
  	Roots Vacuum Pump
  	Magnetic Suspension Molecular Pump
  	Two-stage rotary vane vacuum pump
  TECHNOLOGY	MF Magnetron Sputtering, Linear Ion Source
  POWER SUPPLY	Sputtering power supply + Bias Power supply + Ion Source
  DEPOSITION SOURCE	4 pairs MF Sputtering Cathodes + Ion Source + DC sputters
  CONTROL	PLC+Touch Screen
  GAS	Gas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
  SAFETY SYSTEM	Numerous safety interlocks to protect operators and equipment
  COOLING	Cooling Water
  CLEANING	Glow Discharge/Ion Source
  POWER MAX.	120KW
  AVERAGE POWER CONSUMPTION	70KW

  
  

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.